Transparent Conducting CdO Thin Film Growth Using a Highly Volatile, Thermally and Air-Stable Cadmium Precursor

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Highly conductive and highly textured transparent CdO films are grown from a new MOCVD precursor Cd(hfa)2(TMEDA) (see Figure), which is prepared via a straightforward aqueous route and shown to be a monomeric, volatile, air- and thermally stable source of cadmium. XRD analysis of deposited CdO films confirms an intense (200) reflection of cubic CdO, while EDX and EELS indicate carbon and fluorine contamination to be below detection limits.