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A monomeric titanium complex suitable for liquid‐injection MOCVD applications is synthesized and its molecular structure is determined by single‐crystal X‐ray diffraction. [Ti(OiPr)2‐(tbaoac)2] (see Figure), (tbaoac) = tertiarybutylacetoacetonate), is a volatile alkoxide‐(beta)diketonate precursor that has a low melting point and very good solubility in common organic solvents.
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Bhakta et al. (2003) studied this question.
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