Dependence of radiation induced damage on gate oxide thickness in MOS capacitors with ultrathin gate oxides

The effect of scaling down gate oxide thickness on radiation induced damage in MOS capacitors with sub-10nm gate oxides is reported. The trend of reduction in radiation induced positive charge and interface state generation is observed to continue for these ultrathin gate oxides. Results show that neutral trap generation due to radiation exposure is negligible in sub-10nm gate oxides.