We discuss the design, fabrication and optical performance of a broadband form-birefringent quarter-wave plate for the 3.5 to 5 aem wave-length region. Rigorous coupled wave analysis (RCWA) was used to design the requisite subwavelength grating for silicon substrates in ambient air. Fabricated samples yield a measured phase retardation of 89ø to 102ø over the desired wavelength range.
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Nordin et al. (1999) studied this question.
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