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May 15, 2002Japanese Journal of Applied Physics

Metalorganic Chemical Vapor Deposition of Copper Using (Hexafluoroacetylacetonate)Cu(I)(3,3-dimethyl-1-butene) with a Liquid Delivery System

Kyeong-Keun Choi Sung Gyu Pyo Dok Won Lee Shi‐Woo Rhee

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Abstract

Metalorganic Chemical Vapor Deposition of Copper Using (Hexafluoroacetylacetonate)Cu(I)(3,3-dimethyl-1-butene) with a Liquid Delivery System, Choi, Kyeong-Keun, Pyo, Sung G., Lee, Dok Won, Rhee, Shi-Woo

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Cite This Study

Choi et al. (2002) studied this question.

synapsesocial.com/papers/6a9f70af2767867b1e9657cb https://doi.org/10.1143/jjap.41.2962

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