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September 1, 2012Japanese Journal of Applied Physics

Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

Hirofumi Nogami Takeshi Kobayashi Hironao Okada Takashi Masuda Ryutaro Maeda Toshihiro Itoh

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Abstract

Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices, Nogami, Hirofumi, Kobayashi, Takeshi, Okada, Hironao, Masuda, Takashi, Maeda, Ryutaro, Itoh, Toshihiro

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Cite This Study

Nogami et al. (2012) studied this question.

synapsesocial.com/papers/6a9f750e5a8b0dbb8a04f19f https://doi.org/10.7567/jjap.51.09ld11

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