Based on controlled thin-film fracture and delamination, a simple method to obtain well-aligned nanowires and nanochannels on different substrates is presented. The method is used to create templates in the form of nanoshadow masks. This allows the formation of complex nanowire structures on a variety of substrate materials, such as metals, semiconductors, and polymers. The figure shows parallel Au nanowires on Si fabricated by this approach.
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Elbahri et al. (2006) studied this question.
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