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July 1, 1980Applied Physics Letters

Fabrication of 300-Å metal lines with substrate-step techniques

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Authors

DPD. E. ProberYale UniversityMFM.D. FeuerCollege of Staten IslandNGN. GiordanoEmory University

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Prober et al. (1980) studied this question.

synapsesocial.com/papers/6a7c5aaaef7568706a26bb23https://doi.org/10.1063/1.91716
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