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November 1, 1979Journal of Vacuum Science and Technology

X-ray lithography at ∠100 Å linewidths using x-ray masks fabricated by shadowing techniques

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DFD. C. FlandersHarvard University

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D. C. Flanders (1979) studied this question.

synapsesocial.com/papers/6a93a15af3532cd145ebc345 https://doi.org/10.1116/1.570255

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