Electric-field-driven nano-oxidation trimming of silicon microrings and interferometers

Nanoscale disorder results in severe spectral misalignment of silicon microring resonators and Mach-Zehnder interferometers. We correct for such effects using electric-field-induced waveguide nano-oxidation, demonstrating a tuning wavelength range of several nanometers and 0.002 nm resolution without line shape degradation. Field-induced nano-oxidation is a permanent and precise technique and requires no new materials or high-temperature processing.