Ferroelectric Pb(Zr, Ti)O3 (PZT) thin films were successfully deposited on PbTiO3/ITO/Corning glass and PbTiO3/(100)MgO single-crystal substrates by atmospheric-pressure metal-organic chemical vapor deposition. The PZT thin films deposited at 400° C showed poor optical transparency, while PZT thin films showing high transmittance were deposited above 450° C. The PZT thin films deposited at 500° C showed an optical transparency of 80% and a good quadratic electro-optic effect, of which the coefficient was 1.0×10-18 m2/V2.
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Lee et al. (1995) studied this question.
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