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May 1, 1991Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Ferroelectric thin films for electronic applications

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Authors

GHGene H. HaertlingMotorola (United States)

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Gene H. Haertling (1991) studied this question.

synapsesocial.com/papers/6a82b56be41271e79b8d5f6fhttps://doi.org/10.1116/1.577424
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