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November 1, 1990Japanese Journal of Applied PhysicsOpen Access

Preparation of High-Quality n-Type Poly-Si Films by the Solid Phase Crystallization (SPC) Method

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TMTakao MatsuyamaJapan Steel Works (Japan)KWKenichiro WakisakaKwansei Gakuin UniversityMKM. KamedaSanyo (Japan)

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Matsuyama et al. (1990) studied this question.

synapsesocial.com/papers/6a9fc66137b74494d9ba4e8ahttps://doi.org/10.1143/jjap.29.2327
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