Pulse pile‐up, dead time, escape peaks, background, and peak overlap in Si(Li) spectra are discussed in relation to microprobe analysis, and procedures for carrying out the necessary corrections for quantitative analysis of elements of atomic number 11 to 30 are described. The accuracy is generally comparable with that obtained with crystal spectrometers, though the limit of detection (about 0.1%) is higher.
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Reed et al. (1973) studied this question.
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