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September 8, 2026MicromachinesOpen Access

Design and Implementation of a Quartz Cilia MEMS Vector Hydrophone

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Authors

ZRZiming RenSYShijie YangRXRushan Xie

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Overview

Experimental design demonstrates enhanced low-frequency sensitivity in a hollow quartz cilia vector hydrophone, indicating strong potential for underwater target detection.

Key Points

  • Design and fabricate a MEMS vector hydrophone using a hollow quartz cilium structure to reduce vibration energy loss and improve low-frequency acoustic sensitivity.
  • Conducted parametric finite element simulations via COMSOL Multiphysics 6.3 to optimize the outer radius and height of the hollow quartz cilium.
  • Measured prototype sensitivity and directivity within a 20–1000 Hz frequency range using the standard hydrophone comparison method.
  • Achieved an acoustic sensitivity of –179.1 dB (0 dB = 1 V/μPa) at 1000 Hz, with frequency response matching the theoretical 6 dB per octave slope of pressure gradient sensors.
  • Demonstrated figure-8 directivity patterns at both 315 Hz and 630 Hz, with null depths exceeding 30 dB.

Cite This Study

Ren et al. (2026) studied this question.

synapsesocial.com/papers/6a9fd7c658e84d0ff5b46ba2https://doi.org/10.3390/mi17091061
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