Experimental design demonstrates enhanced low-frequency sensitivity in a hollow quartz cilia vector hydrophone, indicating strong potential for underwater target detection.
Key Points
Design and fabricate a MEMS vector hydrophone using a hollow quartz cilium structure to reduce vibration energy loss and improve low-frequency acoustic sensitivity.
Conducted parametric finite element simulations via COMSOL Multiphysics 6.3 to optimize the outer radius and height of the hollow quartz cilium.
Measured prototype sensitivity and directivity within a 20–1000 Hz frequency range using the standard hydrophone comparison method.
Achieved an acoustic sensitivity of –179.1 dB (0 dB = 1 V/μPa) at 1000 Hz, with frequency response matching the theoretical 6 dB per octave slope of pressure gradient sensors.
Demonstrated figure-8 directivity patterns at both 315 Hz and 630 Hz, with null depths exceeding 30 dB.