Key result
Hollow concave cilium MEMS cardiac sound sensor improves sensitivity by ~7 dB versus planar sensors.
Why the study?
There is a need for low-frequency, high sensitivity, and broadband cardiac murmur signal detection.
The hollow concave cilium MEMS cardiac sound sensor demonstrates improved sensitivity and operating bandwidth for detecting low-frequency cardiac murmurs compared to planar designs.
In light of a need for low-frequency, high sensitivity and broadband cardiac murmur signal detection, the present work puts forward an integrated MEMS-based heart sound sensor with a hollow concave ciliary micro-structure. The advantages of a hollow MEMS structure, in contrast to planar ciliated micro-structures, are that it reduces the ciliated mass and enhances the operating bandwidth. Meanwhile, the area of acoustic-wave reception is enlarged by the concave architecture, thereby enhancing the sensitivity at low frequencies. By rationally designing the acoustic encapsulation, the loss of heart acoustic distortion and weak cardiac murmurs is reduced. As demonstrated by experimentation, the proposed hollow MEMS structure cardiac sound sensor has a sensitivity of up to -206.9 dB at 200 Hz, showing 6.5 dB and 170 Hz increases in the sensitivity and operating bandwidth, respectively, in contrast to the planar ciliated MEMS sensor. The SNR of the sensor is 26.471 dB, showing good detectability for cardiac sounds.
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Wang et al. (2022) studied Cardiac murmur signal detection. Integrated hollow concave cilium MEMS cardiac sound sensor vs. Planar ciliated MEMS sensor was evaluated on Sensitivity and operating bandwidth. The integrated hollow concave cilium MEMS cardiac sound sensor achieved a sensitivity of -206.9 dB at 200 Hz, increasing sensitivity by 6.5 dB and bandwidth by 170 Hz versus a planar sensor.
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