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November 1, 1979Journal of The Electrochemical SocietyOpen Access

Etching Silicon with Fluorine Gas

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Authors

MCM. ChenIBM (United States)VMV. J. MinkiewiczIBM (United States)KLKenneth LeeÉcole Polytechnique Fédérale de Lausanne

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Chen et al. (1979) studied this question.

synapsesocial.com/papers/6aa015d837a2f8dc0e619230https://doi.org/10.1149/1.2128831
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