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January 1, 1977Applied Spectroscopy

Simple Optical Devices for Detection of Radiofrequency Oxygen Plasma Stripping of Photoresists

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EDE. O. DegenkolbAdTech Systems Research (United States)JGJames E. GriffithsBT Research

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Degenkolb et al. (1977) studied this question.

synapsesocial.com/papers/6aa016546e77178a3bd56215https://doi.org/10.1366/000370277774463193
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Synapse has enriched one closely related paper. Consider it for comparative context:

  1. 1Spectroscopic Study of Radiofrequency Oxygen Plasma Stripping of Negative Photoresists. I. Ultraviolet Spectrum1976 · 58 citations