We describe the current performance of the prototype microcalorimeter energy-dispersive spectrometer (cal EDS) developed at NIST for X-ray microanalysis. We show that the low-energy cal EDS, designed for operation in the energy range 0.2-2 keV, offers significant advantages for low-beam-energy microanalysis. We present several examples in which the prototype cal EDS has been used to solve problems in low-voltage microanalysis, including the analysis of tungsten silicide (WSi2), titanium nitride (TiN) and barium titanate (BaTiO3) and the measurement of chemical shifts in Fe and C compounds.
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Wollman et al. (2000) studied this question.
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