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This work presents a model to predict the effect of surface stresses on the ith-mode bending resonant frequency of microcantilevers and its experimental validation. With this model, one can calculate the surface stress acting upon the microcantilever solely by measuring resonant frequencies whereas previously one needed to measure the deflection. Resonant frequency measurement has distinct advantages in terms of ease and accuracy of measurement.
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McFarland et al. (2005) studied this question.
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