Because of its large electromechanical coupling coefficient, LiNbO 3 is attractive as a substrate for surface-acoustic-wave (SAW) devices. However, the fabrication of interdigital transducers with metal line widths of a few hundred nanometres or less on LiNbO 3 using electron-beam lithography is difficult as the material is not conductive. We propose an alternative method to produce high-frequency SAW transducers on the insulating substrate as well as on a conductive substrate. We demonstrate that SAW delay lines that operate in the GHz range can be fabricated using nanoimprint lithography.
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Takagaki et al. (2001) studied this question.
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