Design and fabrication of meso-scale variable capacitance motor for miniature heat pumps

Miniaturization of the heat pump in the meso-scale power domain requires the development of the compressor integrated actuation units in the millimeter range. In this respect, a variable capacitance motor (VCM) is considered for compressor actuation. This work describes the design of a three-phase VCM. A microfabrication technique has been applied for the implementation of the motor using silicon technology. Some static electrical measurements have been conducted for the fabricated motor.