Fabrication of cantilever based mass sensors integrated with CMOS using direct write laser lithography on resist, E Forsén, S Ghatnekar-Nilsson, P Carlberg, G Abadal, F Pérez-Murano, J Esteve, J Montserrat, E Figueras, F Campabadal, J Verd, L Montelius, N Barniol, A Boisen
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Forsén et al. (2004) studied this question.
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