We have used transmission electron microscopy and x-ray crystal truncation rod measurements to investigate thin (<50 Å) CaF2 films grown on Si(111) substrates by molecular beam epitaxy. The results indicate that CaF2/Si can be structurally as perfect as NiSi2/Si and CoSi2/Si, and that a reconstructed layer is present at the CaF2/Si(111) interface.
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Lucas et al. (1992) studied this question.