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We show that epitaxial ZnO nanospears can be deposited onto degenerate p-type Si(001) from an alkaline supersaturated solution of Zn(II) at 70 °C using chemical bath deposition. The lattice mismatch between the hexagonal ZnO and diamond cubic Si is reduced from −40.16% for an un-tilted structure to −0.25% in the ZnO[12̅10] direction and −0.99% in ZnO[257̅6̅] direction by tilting the nanospears 51° relative to the surface normal. The tilted nanostructure brings the (202̅3) planes of ZnO into coincidence with the (001) planes of Si.
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Mu et al. (2009) studied this question.
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