Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation W. D. Sproul; Summary Abstract: Reactively sputtered TiN, ZrN, and HfN. Journal of Vacuum Science & Technology A 1 May 1985; 3 (3): 580–581. https://doi.org/10.1116/1.572998 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology A Search Advanced Search |Citation Search
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W.D. Sproul (1985) studied this question.
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