A Measurement Platform for Label-Free Detection of Biomolecules Based on a Novel Optical BioMEMS Sensor

In this article, a novel optical Bio-microelectromechanical system (MEMS) sensing platform is proposed based on a tunable laser and its lasing wavelength to detect the biomolecules and measure their quantities. The present biosensor consists of a BioMEMS cantilever and a proposed external cavity tunable laser. While the target samples (i.e., DNA, mRNA, or protein) are exposed to the cantilever surface, target-analyte bindings are happened. This can induce a surface stress on the MEMS cantilever and results in its bending due to the surface stress difference in each side of the cantilever. Thus, the gap size between the laser cavity and the gain medium is changed which can be measured by the wavelength variations of the proposed tunable laser source. Consequently, by analyzing the output response, one can detect the amount of target biomolecules in the sample and assign a level of contamination, infection, or bioparticles, caused by the specific disease. Various parameters of the proposed device are designed by numerical and analytical approaches. Furthermore, functional characteristics of the present BioMEMS sensor are obtained as follows: mechanical sensitivity of 1.8μm/Nm-1, optical sensitivity of 422 nm/RIU, Q-factor of 610, and resonant frequency of 6.43 kHz. The obtained functional characteristics of the proposed device show that the present optical BioMEMS sensor can be appealing for highly sensitive diagnoses of various types of diseases and their progress level.