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May 1, 2008Japanese Journal of Applied Physics

Chemical Structural Analysis of Diamondlike Carbon Films with Different Electrical Resistivities by X-ray Photoelectron Spectroscopy

Susumu Takabayashi Keishi Okamoto K. Shimada Kunihiko Motomitsu Hiroaki Motoyama Tatsuyuki Nakatani Hiroyuki Sakaue Hitoshi Suzuki Takayuki Takahagi

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Abstract

Chemical Structural Analysis of Diamondlike Carbon Films with Different Electrical Resistivities by X-ray Photoelectron Spectroscopy, Takabayashi, Susumu, Okamoto, Keishi, Shimada, Kenya, Motomitsu, Kunihiko, Motoyama, Hiroaki, Nakatani, Tatsuyuki, Sakaue, Hiroyuki, Suzuki, Hitoshi, Takahagi, Takayuki

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Takabayashi et al. (2008) studied this question.

synapsesocial.com/papers/6aa13fbb23c04e973172dbef https://doi.org/10.1143/jjap.47.3376

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