A standard 600 °C closed-tube Zn diffusion into an unstrained InP/In0.53Ga0.47As superlattice was found to produce new superlattices containing Zn3P2 layers, and in some cases Zn3As2 layers. Crystalline properties and diffusion profiles were examined by transmission electron microscopy and secondary-ion mass spectrometry. Initial doping of Zn enhances the diffusion of In and Ga and results in a superlattice of uniform In and Ga distribution. Upon further infusion of Zn, Zn3P2 forms selectively in the phosphorus layers and propagates from the surface while maintaining an atomically abrupt Zn3P2/In1−xGaxP interface. Zn3As2 conversion is also observed to occur under sufficiently stringent conditions. Diffusion of P and As was not observed.
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Hwang et al. (1989) studied this question.
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