Fabrication and Characterization of Active-Matrix 960×540 Blue GaN-Based Micro-LED Display

In this paper, we demonstrate a high-resolution960× 540blue-emitting active matrix micro-display. The blue micro-display have a diagonal length of 0.55 inch, a pixel size of8~μ mwith a pixel pitch of12.8~μ m, and high pixel density of 2000 pixels per inch. The single pixel of micro-display exhibits excellent characteristics including an extremely low-leakage current of 0.1 pA at −5 V, a low forward voltage of 2.73 V, a narrow full width at half maximum of 15.7 nm of electroluminescence spectra, a high external quantum efficiency of 13.3%, and a deep-blue emission with CIE coordinates of (0.1589, 0.0542) at11~μ A. Besides, the single pixel of micro-LED also shows high brightness of4.2 × 10⁶and7.4 × 10⁶cd/m2at500~μ Aand 1 mA, respectively. The complete960× 540micro-display has a contrast ratio of 3600000:1, the power consumption with all on is 0.5 W, and the pixel yield rate of about 98.674% analyzed by the software ImageJ.