A self-consistent numerical model has been developed for an RF plasma discharge in oxygen. The model contains about 100 ion-molecular reactions with 13 neutral and charged species of the RF plasma. The energy distributions of both charged and neutral plasma components with respect to the electrodes have been calculated using a Monte Carlo method. The angular distributions of fast neutral species have also been calculated.
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Феоктистов et al. (1995) studied this question.
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