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September 15, 1987Journal of Applied Physics

Phase and energy distribution of ions incident on electrodes in radio-frequency discharges

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Authors

GHGregory A. HebnerSandia National Laboratories CaliforniaMKMark J. KushnerUniversity of Michigan

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Hebner et al. (1987) studied this question.

synapsesocial.com/papers/6a87ff0f2d13770579f4ccd0https://doi.org/10.1063/1.339479
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