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March 15, 1986Journal of Applied Physics

Ion bombardment energy distributions in radio-frequency glow-discharge systems

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Authors

BTBrian E. ThompsonN5 Sensors (United States)KAKenneth D. AllenMedical College of WisconsinARAlbert D. RichardsMassachusetts Institute of Technology

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Thompson et al. (1986) studied this question.

synapsesocial.com/papers/6a70973e26a7f98052dd1204https://doi.org/10.1063/1.336417
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