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April 1, 1984Journal of Applied Physics

Ion dynamics of rf plasmas and plasma sheaths: A time-resolved spectroscopic study

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Authors

RGRichard A. GottschoLam Research (United States)RBRandolph H. BurtonAT&T (United States)DFDaniel FlammS&F Systemtechnik (Germany)

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Gottscho et al. (1984) studied this question.

synapsesocial.com/papers/6a70969af44fa9f079de416ahttps://doi.org/10.1063/1.333267
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