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May 1, 1983Journal of Applied Physics

Evidence for a time dependent excitation process in silane radio frequency glow discharges

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Authors

GRG. De RosnyCentre National de la Recherche ScientifiqueEMEarl R. MosburgAix-Marseille UniversitéJAJohn R. AbelsonUniversity of Illinois Urbana-Champaign

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Rosny et al. (1983) studied this question.

synapsesocial.com/papers/6a7096245671bbf00bc2bb26https://doi.org/10.1063/1.332381
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