Power generation from conductive droplet sliding on electret film

Generating electrical power from low frequency vibration to power portable devices is a challenge that potentially can be met by nonresonant electrostatic energy harvesters. We propose a generator employing a conductive droplet sliding on a microfabricated electret film which is sputtered onto an interdigital electrode and charged already during deposition. Droplet motion causes a capacitance variation that is used to generate electric power. A prototype of the fluidic energy harvester demonstrated a peak output power at 0.18 µW with a single droplet having a diameter of 1.2 mm and sliding on a 2 -µm thick electret film.