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Piezoelectric actuators have become standard elements in microsystem technology. A piezoelectric translater conventionally works as a pure linear actuator (piezotranslator) due to its inherent working principle. If a rotation is implemented with the basic piezoelectric actuation elements, a transmission mechanism is required. This paper presents the development and construction of a novel integrated piezoelectric rotary-linear actuator system that provides two degrees-of-freedom (DoF), including design concept and dynamic modeling. A prototype actuator system has been built to conduct experiments, and the experimental results are in agreement with the simulation results obtained using the derived dynamic model of the system
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Zhang et al. (2006) studied this question.
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