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November 10, 1986Applied Physics Letters

Reaction of titanium with silicon nitride under rapid thermal annealing

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Authors

AMA. E. MorganPhilips (Finland)EBE. K. BroadbentPhilips (Finland)DSD. K. SadanaUniversity of North Carolina at Chapel Hill

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Morgan et al. (1986) studied this question.

synapsesocial.com/papers/6aa303ea4eb0fe97dac228e5https://doi.org/10.1063/1.97424
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