Enhanced optical constants of nanocrystalline yttrium oxide thin films

Yttrium oxide (Y2O3) films with an average crystallite-size (L) ranging from 5 to 40 nm were grown by sputter-deposition onto Si(100) substrates. The optical properties of grown Y2O3 films were evaluated using spectroscopic ellipsometry measurements. The size-effects were significant on the optical constants and their dispersion profiles of Y2O3 films. A significant enhancement in the index of refraction (n) is observed in well-defined Y2O3 nanocrystalline films compared to that of amorphous Y2O3. A direct, linear L-n relationship found for Y2O3 films suggests that tuning optical properties for desired applications can be achieved by controlling the size at the nanoscale dimensions.