Fabrication and Integration of Micromachined Submillimeter-Wave Circuits

Micromachining techniques have been shown to have the necessary precision to fabricate accurate submillimeter-wave circuits and structures; however, few submillimeter-wave circuits created by these techniques have been integrated into existing systems. This article builds on previous lithographic micromachining techniques to fabricate and integrate geometrically complex submillimeter-wave waveguide circuits that cannot be fabricated by conventional machining, specifically a lowpass filter.