We have recently investigated ion beam sputtering and ion assisted deposition of Pb1−xLax(ZryTiz)1−x/4O3 (PLZT). Ion beam sputtered PLZT films display strong second-harmonic generation. Good quality material has been deposited on substrates of Si, Si with a buffer layer of SiO2 , and fused silica. The surface morphology of ion beam sputtered PLZT is of very high quality.
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Boyer et al. (1989) studied this question.
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