Kinoform with 64 phase levels for use as an array generator

A transmissive kinoform with 64 phase levels is demonstrated that is used as a beam array generator. This kinoform converts a single beam to a 5 x 5 beam array. The measured diffraction efficiency is 75.56%, near the designed value of 79.68%. The measured intensity difference among the different diffraction orders of the 5 x 5 beam array is 21.56%, and the designed value is 10.99%. The total aperture of the kinoform is 10 mm x 10 mm.