A closed-loop nanoscale precision stage is integrated with an atomic force microscope to mechanically fabricate 3D nanostructures according to predetermined designs, such as 3D human face nanostructures, nanoline arrays of sine-wave and triangular nanostructures, and nanodot arrays of sine-shaped, hemispheric, and concave/convex nanopatterns in a controllable and reproducible fashion.
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Yan et al. (2010) studied this question.
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