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November 1, 1986Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Chemical vapor deposition and physical vapor deposition coatings: Properties, tribological behavior, and applications

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KHK.‐H. Habig

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K.‐H. Habig (1986) studied this question.

synapsesocial.com/papers/6aa428968cc5e72c23b72089 https://doi.org/10.1116/1.573687

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