Investigation of parasitic resistance and capacitance effects in nanoscaled FinFETs and their impact on static random-access memory cells

A thorough investigation of the parasitic resistance and capacitance (RC) effects of a single-fin FinFET on logic CMOS devices and circuits is presented. As parasitic RC effects become increasingly prominent in nanoscaled FinFET technologies, they are critical to the overall device and circuit performance. In addition, the effects of dummy patterns as well as multifin structures are analyzed and modeled in detailed. By incorporating parasitic resistance and capacitance extracted by both measurement and simulation, the static and dynamic performance characteristics of standard six transistor static random-access memory (6T-SRAM) cells are comprehensively evaluated as an example of parasitic RC effects in this investigation.