Micro-Four-Point Probes in a Uhv Scanning Electron Microscope for in-Situ Surface-Conductivity Measurements

For in-situ measurements of surface conductivity in ultrahigh vacuum (UHV), we have installed micro-four-point probes (probe spacings down to 4 μm) in a UHV scanning electron microscope (SEM) combined with scanning reflection–high-energy electron diffraction (RHEED). With the aid of piezoactuators for precise positioning of the probes, local conductivity of selected surface domains of well-defined superstructures could be measured during SEM and RHEED observations. It was found that the surface sensitivity of the conductivity measurements was enhanced by reducing the probe spacing, enabling the unambiguous detection of surface-state conductivity and the influence of surface defects on the electrical conduction.