We report a quantitative theoretical and experimental analysis of strain relaxation in GexSi1−x/Si(110) heterostructures. It is shown that above a critical composition, the critical thickness for edge a/6〈112〉 Shockley partial dislocations is less than that for 60° a/2〈110〉 total dislocations. The net (excess) stress is greater on the edge a/6〈112〉 dislocations for epilayer thicknesses, h
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Hull et al. (1992) studied this question.
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