A high sensitivity calibrated electric field meter based on the electric potential sensor

An electric field measurement system with a maximum sensitivity of 2.6 mu V m(-1) and an associated accuracy of 2% is described. It is based on the ultra-high input impedance electric potential sensor and is calibrated using a test structure of well-defined geometry to establish a calculable electric field. Finite element simulations are used to verify the field geometry and include the effect of finite boundary conditions due to the proximity of grounded structures. These are found to have a considerable effect on the uniformity of the field. The agreement seen between the measurements and simulations is achieved using a single numerical calibration factor and indicates that the presence of the sensor causes no significant perturbation of the electric field.