Identification of positive secondary ions in static sims spectra of poly(methylmethacrylate) using the deuterated polymer

Positive static SIMS spectra of poly(methylmethacrylate) (PMMA) and perdeuterated PMMA have been compared. The usefulness of this approach for the distinction between hydrocarbon and oxygen‐containing secondary ions is demonstrated. For example, a major characteristic fragment like the one at 69 amu, which had been tentatively identified as C 5 H 9 + by other authors, was shown to be C 4 H 5 O + .