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The changes in electrical resistance in thin films of gold, copper, and aluminum upon irradiation with heavy charged particles were studied. As a function of dose, there is a steady increase in resistance and a monotonic decrease in the damage rate. A large part of the initial decrease is due to the size effect; however, at higher defect densities the thin film damage rate approaches bulk values.
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Merkle et al. (1967) studied this question.
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